Computer processing of SEM images by contour analyses

摘要

Techniques involving the computer processing of scanning electron microscope (SEM) images using a contour approach have been developed. For each picture from one to six different SEM signals are converted from analog to digital form and recorded on magnetic tape for subsequent computer analysis.A program finds and analyzes coordinate arrays representing the reconstructed computer picture. Least squares fitting of the contour arrays to ellipses provides measurements of the aspect ratios and orientations of the picture fields. Line integration techniques produce areas and perimeters. Computer plotting enables both the visual comparison of the reconstructed picture with a photograph of the image on the cathode ray tube of the SEM and an estimate of the accuracy of the ellipse fits.