Computer analysis of multi-channel SEM and X-ray images from fine particles

摘要

Techniques involving the computer processing of scanning electron microscope (SEM) images using a binary coded map approach have been developed. For each picture from one to six different SEM signals are converted from analog to digital form and recorded on magnetic tape for subsequent computer analysis.The analysis of fine grained Al2O3 particles and multiphase particulate mixtures is carried through from the sample preparation, the actual examination under the SEM, the digital recording of the image and finally the computer processing of the images. The computer program and the results are viewed step by step—with an explanation of the possibilities.