Anisotropic diffusion with generalized diffusion coefficient function for defect detection in low-contrast surface images

摘要

In this paper, an anisotropic diffusion model with a generalized diffusion coefficient function is presented for defect detection in low-contrast surface images and, especially, aims at material surfaces found in liquid crystal display (LCD) manufacturing. A defect embedded in a low-contrast surface image is extremely difficult to detect, because the intensity difference between the unevenly illuminated background and the defective region is hardly observable and no clear edges are present between the defect and its surroundings.The proposed anisotropic diffusion model provides a generalized diffusion mechanism that can flexibly change the curve of the diffusion coefficient function. It adaptively carries out a smoothing process for faultless areas and performs a sharpening process for defect areas in an image. An entropy criterion is proposed as the performance measure of the diffused image and then a stochastic evolutionary computation algorithm, particle swarm optimization (PSO), is applied to automatically determine the best parameter values of the generalized diffusion coefficient function. Experimental results have shown that the proposed method can effectively and efficiently detect small defects in various low-contrast surface images.