Deep reinforcement learning based scheduling within production plan in semiconductor fabrication
作者：
Highlights：
• Deep reinforcement learning is employed for a semiconductor scheduling problem.
• A Markov decision process is presented for scheduling to fulfill production plans.
• The performance of the proposed method outperforms other scheduling methods.
摘要
•Deep reinforcement learning is employed for a semiconductor scheduling problem.•A Markov decision process is presented for scheduling to fulfill production plans.•The performance of the proposed method outperforms other scheduling methods.
论文关键词：Deep reinforcement learning,Production planning,Scheduling,Semiconductor fabrication,Intelligent manufacturing
论文评审过程：Received 26 December 2020, Revised 26 August 2021, Accepted 10 November 2021, Available online 15 November 2021, Version of Record 17 December 2021.
论文官网地址：https://doi.org/10.1016/j.eswa.2021.116222
