Active cluster annotation for wafer map pattern classification in semiconductor manufacturing

作者：

Highlights：

• Active cluster annotation is proposed for wafer map pattern classification.

• High-performance CNN is achieved with reduced annotation cost.

• Multiple wafer maps are annotated in cluster-level annotation.

• Cluster-level annotation can yield consistent labels.

摘要

•Active cluster annotation is proposed for wafer map pattern classification.•High-performance CNN is achieved with reduced annotation cost.•Multiple wafer maps are annotated in cluster-level annotation.•Cluster-level annotation can yield consistent labels.

论文关键词：Wafer map pattern classification,Active learning,Uncertainty estimation,Cluster-level annotation

论文评审过程：Received 30 October 2020, Revised 28 February 2021, Accepted 10 June 2021, Available online 23 June 2021, Version of Record 25 June 2021.

论文官网地址：https://doi.org/10.1016/j.eswa.2021.115429